Precision Optics
Precision optics perfected for performance and affordability
Overview
From laser optics to high-end photovoltaics or infrared optics, Evatec’s evaporation and sputter platforms equipped with Advanced Process Control technology deliver the best cost of ownership for mass production of optical components.
Our production platforms enable the deposition of filters, antireflection coatings, high reflective mirrors, or beam splitters. Evatec processes enhance the performance of the optical components significantly.
Production Tools
The Evatec Tool Portfolio for Precision Optics
We offer evaporation and sputter technologies on a range of batch, cluster, or fully automated inline platforms.
Our experts are on hand to help you find the right platforms according to your process requirements, throughput, and factory integration needs. Alternatively, click on the button to read more about each platform.
BAK Family
Evaporators from 0.5 to 2.0 meters with proprietary e-gun technologies offering enhanced PIAD processes and flexibility for quick changes of materials, substrate size, shape, and curvature.
CLUSTERLINE® 200
Cassette-to-cassette 8-inch cluster to semiconductor industry handling and tracking standards equipped with batch module sputter processing. Evatec’s CLUSTERLINE® 200 BPM superior particle performance is the tool of choice for all applications requiring low particle levels, such as for metasurfaces.
Advanced Process Control
Evatec production platforms integrate a range of closed-loop process control techniques for improved precision and yield.
- check Broadband Optical Monitoring for direct substrate measurement with in-situ reoptimization for real-time recipe adjustment during evaporation or sputter deposition.
- check Plasma Emission Monitoring for perfect stoichiometry control and enhanced sputter deposition rates.
- check Optical Pyrometry in evaporation and sputter processes for reliable temperature control in IR technologies.
- check Optics Tool Box ensures smooth integration all the way from thin film design through recipe generation and coating execution. Reduce your process development times and increase your throughput.
Click here to learn more about in-situ reoptimization, hybrid mode monitoring (broadband & monochromatic), and read other case studies illustrating how you can optimize your optical thin film production.
Precision Optics
Evatec’s Advanced Process Control technologies, including broadband optical monitoring, support evaporation or sputter processes for a wide range of applications from UV to VIS and IR.
A track record of over 6000 BAK platforms sold over 50+ years proves the flexibility and reliability of our BAK evaporation platform, be it conventional evaporation or ion-assisted deposition.
CLUSTERLINE® 200 BPM platform offers cassette-to-cassette sputter solutions and uses custom cathode technologies for enhanced precision and lower particles. From edge-emitting lasers (EELS) to coatings on solar cells for space applications, our process teams have access to 70+ years of know-how and substrate handling to support precision optics coating applications.