3rd March 2025
LAYERS 8 – PEALD: The new kid on the CLUSTERLINE® block
Our Manager Technology Development, Dominik Hartmann, and our Principal Scientist, Dr. Joerg Patscheider, present a new module for Plasma-Enhanced Atomic Layer Deposition (PEALD).As just one of the modules available on the CLUSTERLINE® 200 family, customers can freely combine it in configurations of up to six modules per cluster together with established techniques like sputter, etch and PECVD.
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