Silicon Austria Labs pushes boundaries in PZT

The deposition of thin film piezo materials like PZT with its high piezoelectric coefficients and strong electro-mechanical coupling is essential to support production of tomorrow’s smart sensors and actuators in applications like Ultrasonic Transducers (pMUT), micromirrors and inkjet heads. Developing robust manufacturing processes that control optimal crystalline growth, film stress and uniformity are all key to delivering the PZT films needed by MEMS foundries and IDMs. That’s exactly what Silicon Austria Labs has set out to do with recent investments in new manufacturing capability.  

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