CLUSTERLINE® 200 BPM
Cassette-to-cassette processing for best cost of ownership in batch processing on 200mm
Descrete LED / Laser
- Market leading solutions for Mini & Micro LED
- Tailored processes for metals, DBRs and TCOs
Wafer Level Optics
- Low particles and highest deposition uniformities for best production yields
- Proven production knowhow - from biometric sensing to EELs and metalenses
Wireless
- Precision in gap filling and planarization processes
- Highest flexibility for production switch between different substrate sizes