SOLARIS® Family
Inline production platforms
Family of tools leading the way in ultra high volume consumer applications
Fully Automated Fabs
- Unique “indexing” system for high speed transport
- Flexible tooling systems according to substrate & application
Choice of platforms sizes
- S151 – up to 8 inch diagonal
- S380 – up to 15 inch diagonal
Take the lead in high speed
- Proven Evatec handling know how
- Proven process know how – metals, dielectrics and TCOs
SOLARIS® Family
SOLARIS® sputter platforms combine the know-how from delivering over 5000 high speed optical disk systems with experience gained from over 3000 semiconductor PVD tools to deliver a new approach in thin film mass production. With their "inline" architecture, SOLARIS® platforms are designed for "fully automated fabs" increasing throughput and eliminating manual handling. From Touch Panels to EMI Shielding, Thermoelectric Generators, Power Devices and Photovoltaics, the S151 and S380 platforms offer flexible high speed manufacturing solutions for rigid and flexible substrates.
SOLARIS® S151
The S151 is a work horse for cost efficient high volume production for selected applications in Power Devices, Photovoltaics and Photonics using RTP, PVD, etch or CVD technologies. Its proven carrier system guarantees secure high speed handling for substrates up to 8 inch diagonal.
SOLARIS® S380
The S380 is optimized for high volume production of larger flexible or rigid substrates by RTP, PVD, Etch or CVD technologies. It's proven carrier system guarantees secure high speed handling for substrates up to 15 inch diagonal.