SOLARIS® Family
Inline production platforms
Family of tools leading the way in ultra high volume consumer applications
Fully Automated Fabs
- Unique “indexing” system for high speed transport
- Flexible tooling systems according to substrate & application
Choice of platforms sizes
- S151 – up to 8 inch diagonal
- S380 – up to 15 inch diagonal
Take the lead in high speed
- Proven Evatec handling know how
- Proven process know how – metals, dielectrics and TCOs
SOLARIS® Family
SOLARIS® sputter platforms combine the know-how from delivering over 5000 high speed optical disk systems with experience gained from over 3000 semiconductor PVD tools to deliver a new approach in thin film mass production. With their "inline" architecture, SOLARIS® platforms are designed for "fully automated fabs" increasing throughput and eliminating manual handling. From Touch Panels to EMI Shielding, Thermoelectric Generators, Power Devices and Photovoltaics, the S151 and S380 platforms offer flexible high speed manufacturing solutions for rigid and flexible substrates.
Interactive Element
Click on the individual sections in the circle to read the details.
Vacuum
Vacuum pumps of the tool are mainly turbo molecular pumps in conjunction with dry rotary pumps. Ultimate pressure will be in the low E-7mbar range. Every chamber is equipped with it’s individual pump, while separating vacuum during process completely. Cross over is minimal during substrate transport from chamber to chamber.
PVD Single Source
Available DC / DC reactive / 13.56MHz RF sources of up 6 chambers. Single target sources with a standard target diameter of ø300mm. Individual chamber venting for target change while other chambers remain under vacuum.
PVD Multi Source
Ideal to create new materials by simultaneous sputtering of different materials. Available DC / DC reactive / 13.56MHz RF sources. Any combination of 4 sources with targets with standard target diameter of ø100mm. is allowed. Individual chamber venting for target change while other chambers remain under vacuum.
PVD 3D Source
3D deposition of DC / DC reactive processes by using 2 rotary sources per chamber of any substrate with a max. size of 95x190mm rectangular size on up to 6 different chambers.
Etch
Etching of metal and/or oxides in substrates up to 200mm diameter. (Hard etch). Alternatively, also a Glow discharge cleaning station is available in order to remove organic residues on substrate surfaces. Adhesion improvement by surface activation.
Cool
Rapid cool down of hot substrates in a individual chamber in order not to exceed a certain temperature of a substrate.
Heat
Rapid heating of substrates in a individual chamber up to 400°C in order prepare a substrate prior coating.
Substrate Rotation
Each substrate rotates in each process chamber to get perfect angular uniformity of a substrate as a default function.
Flexible Substrates
Highly flexible substrate sizes by using a dedicated substrate carrier for a given substrate. Substrate might have any shape up to a max diameter of 220mm and 4mm thickness. Every size that is within this range can be transported and coated.
High Throughput
up to 1200 pcs (depending on process) and up to 6 process chambers running in parallel.
SOLARIS® S151
The S151 is a work horse for cost efficient high volume production for selected applications in Power Devices, Photovoltaics and Photonics using PVD, PVE and RTP technologies. Its proven carrier system guarantees secure high speed handling for substrates up to 8 inch diagonal.
SOLARIS® S380
The S380 is optimized for high volume production of larger flexible or rigid substrates by PVD, PVE and RTP technologies. It's proven carrier system guarantees secure high speed handling for substrates up to 15 inch diagonal.
Read more about SOLARIS® Family in our LAYERS magazine
SOLARIS® – Increasing Throughput for Thick Aluminum Layers
A dose of the hard stuff is just what you need
Today's smart devices offer us more capability than ever, but we expect them to be more robust than ever too. Learn about the new hard coating solutions available to protect them as they taking a pounding in our pockets or lying in the sand.
Buying a new Evatec tool is just the first step in a long term partnership. From initial ramp up support to ongoing maintenance or retrofits adding new capabilities, maximise both uptime and tool working life together with Evatec’s local customer service teams.
- We can help you plan and manage your stocks
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- Helping you extend tool working life
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