Custom Solutions
The only limit is your imagination
Do you need a special chamber size, a special source or a tooling solution or a system suitable for R&D?
Custom build in a nutshell
- Access our design and mechanical engineering teams to design a custom chamber configuration
- Develop new sources and process control techniques through our applications specialists
- Configure a research tool for your University or Industrial Research Institute
The only limit is your imagination
- With a host of options for special geometries, source designs and process control techniques we hope you will find something within our standard portfolio to meet your needs, but with over 2000 systems delivered around the globe, we have access to a whole history of custom mechanical engineering solutions and special source designs. We can put together a custom BAK design that’s just right for you. The BAK UNI is just one example of an Evatec system focused specifically on the needs of Universities and Industrial Research Institutes.
Contact us to ask about our approach to custom build and find out more about BAK UNI capabilities and options.
BAKs can be delivered with a choice of assisted loading options that fit your throughput, handling and substrate tracking needs.
Single wafer / carrier transfer
Ideal for smaller size systems with limited substrate capacity, this front side transfer system means the process chamber can be kept under vacuum ready for coating once each position in the carrier is loaded. Access to the chamber for maintenance or source replenishment is via the grey room.
Assisted calotte load / unload ("Lazy Susan")
The preloaded calotte is transferred through the standard front door at atmosphere. Available across a wide range of system sizes, this system is ideal where loading heights make manual handling more difficult or loaded carriers are heavy to BAK in atmosphere. A second load / unload station can be integrated to reduce overall handling times.
Assisted load including load lock
Starting with all the flexibility of the BAK evaporator platform, the BAK911 helps you raise production to new levels of output. Convenient loading of the calotte before automated transfer to process chamber via lock ensures better vacuum conditions, shorter cycle times and the best levels of process repeatability. Why not watch the video then contact your local Evatec sales and service office to find out more.
Cassette-to-cassette with load lock – Multi BAK
For even greater level of automation why not configure up to 4 BAK 911 in a cluster configuration in the Multi BAK. With front end atmospheric robot serving all four process modules, this cassette to cassette solution for 6 and 8 inch eliminates all manual handling for high throughput typical applications across MEMS, power and wireless.
The “BAK” name may be 50 years old but with the choice of more deposition and control technologies than ever before, there’s never been a better time to bring your existing BAK up to the latest standards to achieve new levels of process control and yield in deposition of metals, oxides, TCOs and compounds.
WHY RETROFIT
- Enable new complex processes
- Improved process yields
- Increase uptime
- Track your processes – data logging & QA
- Replace obsolescent parts
ENHANCING COATER PERFORMANCE
Achieve new levels of coater performance through upgrades. To find out more about retrofit possibilities on your existing BAK click here to download the brochure
Do you need a special chamber size, a special source or a tooling solution or a system suitable for R&D?
Custom build in a nutshell
- Access our design and mechanical engineering teams to design a custom chamber configuration
- Develop new sources and process control techniques through our applications specialists
- Configure a research tool for your University or Industrial Research Institute
The only limit is your imagination
- With a host of options for special geometries, source designs and process control techniques we hope you will find something within our standard portfolio to meet your needs, but with over 2000 systems delivered around the globe, we have access to a whole history of custom mechanical engineering solutions and special source designs. We can put together a custom BAK design that’s just right for you. The BAK UNI is just one example of an Evatec system focused specifically on the needs of Universities and Industrial Research Institutes.
Contact us to ask about our approach to custom build and find out more about BAK UNI capabilities and options.
BAKs can be delivered with a choice of assisted loading options that fit your throughput, handling and substrate tracking needs.
Single wafer / carrier transfer
Ideal for smaller size systems with limited substrate capacity, this front side transfer system means the process chamber can be kept under vacuum ready for coating once each position in the carrier is loaded. Access to the chamber for maintenance or source replenishment is via the grey room.
Assisted calotte load / unload ("Lazy Susan")
The preloaded calotte is transferred through the standard front door at atmosphere. Available across a wide range of system sizes, this system is ideal where loading heights make manual handling more difficult or loaded carriers are heavy to BAK in atmosphere. A second load / unload station can be integrated to reduce overall handling times.
Assisted load including load lock
Starting with all the flexibility of the BAK evaporator platform, the BAK911 helps you raise production to new levels of output. Convenient loading of the calotte before automated transfer to process chamber via lock ensures better vacuum conditions, shorter cycle times and the best levels of process repeatability. Why not watch the video then contact your local Evatec sales and service office to find out more.
Cassette-to-cassette with load lock – Multi BAK
For even greater level of automation why not configure up to 4 BAK 911 in a cluster configuration in the Multi BAK. With front end atmospheric robot serving all four process modules, this cassette to cassette solution for 6 and 8 inch eliminates all manual handling for high throughput typical applications across MEMS, power and wireless.
The “BAK” name may be 50 years old but with the choice of more deposition and control technologies than ever before, there’s never been a better time to bring your existing BAK up to the latest standards to achieve new levels of process control and yield in deposition of metals, oxides, TCOs and compounds.
WHY RETROFIT
- Enable new complex processes
- Improved process yields
- Increase uptime
- Track your processes – data logging & QA
- Replace obsolescent parts
ENHANCING COATER PERFORMANCE
Achieve new levels of coater performance through upgrades. To find out more about retrofit possibilities on your existing BAK click here to download the brochure