Sources & Tooling
A complete portfolio using Evatec know-how
Your BAK is prepared for installation of a whole range of deposition and etch sources including accessories like front and backside heating systems.
The chamber base plate and side walls come with a series of standard feedthroughs enabling installation of the combinations of deposition and etch sources required for layer processing.
All our sources are engineered for 24/7 production, robust and easy to maintain, optimized for the lowest materials utilization and the best repeatability.
As process requirements change in the future, simply reconfigure your system by moving, exchanging or adding new ones, reconfigure your “Khan” control system in just a few minutes and you are ready to go. Control rates and terminate your layers with Evatec’s QCM quartz monitoring technology at 5 or 6MHz featuring high sampling rates, high speed switch between crystals and simultaneous control of up to 4 quartz heads from a single controller. For real time direct measurement of optical layer performance during deposition choose monochromatic or broadband optical monitoring techniques for UV, VIS and IR.
Evatec’s portfolio of tooling solutions is designed to maximize batch capacity for evaporation processes without compromise on film quality. Choose from single piece and segmented domes with standard geometries or flip systems for double sided processes.
For high rate metallization our range of planetary system designs enables larger batch sizes and lowest materials utilization and for complex substrate geometries our engineering department offers a bespoke design service.
Where wall or door mounted large area rectangular sputter sources are specified, we offer proven rotary cage tooling designs for easy load / unload of carriers and maximum coating area per batch.
Your BAK is prepared for installation of a whole range of deposition and etch sources including accessories like front and backside heating systems.
The chamber base plate and side walls come with a series of standard feedthroughs enabling installation of the combinations of deposition and etch sources required for layer processing.
All our sources are engineered for 24/7 production, robust and easy to maintain, optimized for the lowest materials utilization and the best repeatability.
As process requirements change in the future, simply reconfigure your system by moving, exchanging or adding new ones, reconfigure your “Khan” control system in just a few minutes and you are ready to go. Control rates and terminate your layers with Evatec’s QCM quartz monitoring technology at 5 or 6MHz featuring high sampling rates, high speed switch between crystals and simultaneous control of up to 4 quartz heads from a single controller. For real time direct measurement of optical layer performance during deposition choose monochromatic or broadband optical monitoring techniques for UV, VIS and IR.
Evatec’s portfolio of tooling solutions is designed to maximize batch capacity for evaporation processes without compromise on film quality. Choose from single piece and segmented domes with standard geometries or flip systems for double sided processes.
For high rate metallization our range of planetary system designs enables larger batch sizes and lowest materials utilization and for complex substrate geometries our engineering department offers a bespoke design service.
Where wall or door mounted large area rectangular sputter sources are specified, we offer proven rotary cage tooling designs for easy load / unload of carriers and maximum coating area per batch.