The "inline" SOLARIS® S380 offers easy tool configuration and scope for future expansion for multiple processes and substrate sizes. It handles carriers up to 15 inch diagonal. Proven manufacturing performance combined with easy size conversion provides excellent utilization and CoO.
Choose SOLARIS® S380 for selected high volume processes like chip scale EMI shielding or touch panel.
SOLARIS® S380 offers integration of sputter, heating / annealing and CVD technology on up to 5 process stations.
Tool Highlights
Choose from large area single DC, DC Reactive or RF sputter with cooling, etch and RTP capabilities up to 550°C, Evatec multisource capability for up to 4 sputter cathodes at a single process module or custom sources for deposition of materials like Parylene.
All process modules run independently in isolation and are configured according to your application.
Dielectrics: SiN-H, SiN, SiO2, Al2O3, SiC
Metal Oxides: NbO2, TiO2, Ta2O5
TCOs: ITO, GZO, Zn: AlO
Metal stacks: Al, NiV, Ag, AuGe
Alloys with MSQ multisource
Deposition uniformities <±2% over whole carrier
Parylene coatings - C, N and F with superior uniformities and reduced dimer usage
Additional custom source technologies like Evatec's "Penta Plus" cathodes deliver precise step coverage solutions in applications like EMI shielding.
For more information about SOLARIS® capabilities download the brochure, take a look at some of the stories in Evatec's LAYERS magazine or contact your local sales and service organization.
The "inline" SOLARIS® S380 offers easy tool configuration and scope for future expansion for multiple processes and substrate sizes. It handles carriers up to 15 inch diagonal. Proven manufacturing performance combined with easy size conversion provides excellent utilization and CoO.
Choose SOLARIS® S380 for selected high volume processes like chip scale EMI shielding or touch panel.
SOLARIS® S380 offers integration of sputter, heating / annealing and CVD technology on up to 5 process stations.
Tool Highlights
Choose from large area single DC, DC Reactive or RF sputter with cooling, etch and RTP capabilities up to 550°C, Evatec multisource capability for up to 4 sputter cathodes at a single process module or custom sources for deposition of materials like Parylene.
All process modules run independently in isolation and are configured according to your application.
Dielectrics: SiN-H, SiN, SiO2, Al2O3, SiC
Metal Oxides: NbO2, TiO2, Ta2O5
TCOs: ITO, GZO, Zn: AlO
Metal stacks: Al, NiV, Ag, AuGe
Alloys with MSQ multisource
Deposition uniformities <±2% over whole carrier
Parylene coatings - C, N and F with superior uniformities and reduced dimer usage
Additional custom source technologies like Evatec's "Penta Plus" cathodes deliver precise step coverage solutions in applications like EMI shielding.
For more information about SOLARIS® capabilities download the brochure, take a look at some of the stories in Evatec's LAYERS magazine or contact your local sales and service organization.