SOLARIS® FAMILY

From Touch Panels to EMI Shielding, Power Devices to Photovoltaics, SOLARIS® platforms are designed for "fully automated fabs". Choose from the S151 configured for substrates up to 8 inch diagonal or the S380 for substrates up to 15 inch diagonal.

Functional Coatings

Elevate your product performance with Evatec high-end Functional Coatings solutions, - high perfomance and high volume at the lowest cost of ownership.

Company Overview

Our technology has been shaping the world for over 70 years. Find out more about our company, our products and how Evatec thin films are everywhere in our daily lives. 

PVD Technologies

Find out how Evatec's evaporation and sputter technology know-how can help you increase your yields and drive down your costs.

Etch Technologies

From modification of sensitive coatings to high rate layer removal, read more about Evatec plasma source technology covering applications at wafer or panel level. 

Wafer Level Optics (WLO)

Power Devices

Benefit from Evatec's long experience in Power Device applications to increase your productivity, process stability and yield in volume production of MOSFETs, IGBTs, IGCTs, LDMOS, SiC and GaN Power Devices.

SOLARIS® S151

The S151 is a work horse for cost efficient high volume production for selected applications in Power Devices, Photovoltaics and Photonics using RTP, PVD, etch or CVD technologies. Its proven carrier system guarantees secure high speed handling for substrates up to 8 inch diagonal.

SOLARIS® S380

The S380 is optimized for high volume production of larger flexible or rigid substrates by RTP, PVD, Etch or CVD technologies. It's proven carrier system guarantees secure high speed handling for substrates up to 15 inch diagonal.

APC Technologies

See how Evatec's Advanced Process Control (APC) Technologies can help you increase precision and production yield for thin film processes.