Wafer Level Optics
Miniaturized optics, maximized efficiency with Evatec
Overview
From automotive applications to smart glasses ,mobile devices and Photonic Integrated Circuits (PIC), Evatec’s evaporation and sputter platforms equipped with Advanced Process Control technology deliver the best cost of ownership for high-volume mass production.
Whether it's Biometric Sensing or Augmented Reality, our production platforms enable the deposition of filters, ARs, DBRs, or high reflective coatings. Evatec processes enhance the performance of sensors, cameras, and smart devices.
Production Tools
The Evatec Tool Portfolio for Wafer Level Optics
We offer evaporation and sputter technologies on a range of batch, cluster, or fully automated inline platforms.
Our experts are on hand to help you find the right platforms according to your process requirements, throughput, and factory integration needs. Alternatively, click on the button to read more about each platform.
BAK Family
Evaporators from 0.5 to 1.4 meters with proprietary e-gun technologies offering enhanced PIAD processes and flexibility for quick changes of materials, substrate size, shape, and curvature.
SOLARIS®
Family of inline platforms for highest throughput in production of AR coatings for smart glasses on single substrates or mini batches on carriers in consumer applications.
CLUSTERLINE® 200
Cassette-to-cassette 8-inch cluster to semiconductor industry handling and tracking standards equipped with batch module sputter processing for technologies like wafer-level optics.
CLUSTERLINE® 300
Cassette-to-cassette 12-inch cluster to semiconductor industry handling and tracking standards equipped with single process modules processing for technologies like wafer-level optics.
Advanced Process Control
Evatec production platforms integrate a range of closed-loop process control techniques for improved precision and yield.
- check Broadband Optical Monitoring for direct substrate measurement with In situ reoptimization for real-time recipe adjustment during evaporation or sputter deposition.
- check Plasma Emission Monitoring for perfect stoichiometry control and enhanced sputter deposition rates.
Click here to download the brochure on Optical Monitoring to learn more about In situ Reoptimization, Hybrid mode monitoring (broadband & monochromatic), and read other case studies illustrating how you can optimize your optical thin film production.
Wafer Level Optics
Securing process repeatability and low particle levels is essential for high-yield production in wafer-level optics applications. Fully automated cassette-to-cassette production technology eliminates all manual handling.
From automotive to avionics and smart glasses consumer applications, we support the deposition of the thin films required in a range of Augmented Reality / Mixed Reality (AR/MR) applications.
Antireflection coatings for a large angle of incidence range on high index glass, in-coupling or out-coupling gratings, Evatec offers dedicated fully automated solutions for mass production.
From AR/VR to biometric sensing and EELs you can read more about typical applications of WLO and how Evatec solutions are supporting customers in our LAYERS magazine below.
Read more about WLO
Side Wall Coverage
Discover why side wall coverage is crucial for thin film processes in Micro LED applications and how Evatec's CLUSTERLINE® solutions meet these needs.
Seeing the world in a new way
Evatec introduces different Smart Glasses technologies and the cost effective thin film coating solutions on 200 or 300mm required for mass market application.
How does my smartphone recognize me?
Fingerprint and face recognition secure mobile devices. Evatec's tools support these applications globally. Learn more about biometrics and optical coatings.