MULTIBAK
Welcome to the new world of the MULTI BAK
Evatec introduced the Multi BAK platform in 2022, setting a new standard for high-volume thin film processing. Built on proven expertise in automated wafer handling and load lock technology, the Multi BAK combines multiple BAK process chambers in a clustered architecture around an atmospheric robot handler.
This advanced system design ensures even better process repeatability, stable production conditions, and significantly increased throughput – making it ideal for demanding, high-volume manufacturing environments.
Two configurations are available to match specific process requirements:
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Multi BAK Cluster System
A fully integrated cluster tool with atmospheric front-end module and robotic handling, supporting up to four BAK process chambers in a single platform. Designed for maximum scalability, productivity, and process consistency. -
BAK911 Single-Chamber System
A compact solution for applications requiring a single process chamber, while still benefiting from load lock substrate handling for improved process control and repeatability.
Both configurations are optimized for 6-inch and 8-inch wafer processing and deliver high throughput with excellent uniformity. They are tailored for advanced applications in Wireless, RF devices, and Optoelectronics manufacturing, where precision and production efficiency are critical.
Multi BAK Platform Summaries – a quick guide
Click on the individual sections in the circle for a quick overview, and then find more information further down the page.
Multi BAK Summary
Choose Multi BAK for
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Standard front end "Cassette" or "SMIF" load ports. Completely automated handling from front end to process chamber and back eliminates manual handling
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Configure up to 4 BAK modules in one tool around the atmospheric front end module (EFEM).
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Reduce batch processing times significantly compared with classical front loaded manual systems.
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Complete management of individual substrate journey with each wafer returned to original cassette position.
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Tracking of every wafer to an individual location, segment or process batch for even greater level of automation.
FEM BAK911
Front End Module (FEM)
Ergonomic front end module for easy segment load by operator before automated transfer of segments via the Loadlock Transfer Module
BAK911 Summary
Choose BAK911 for:
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Singe process chamber configuration with front ergonomic front end load module
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Transfer of BAK segments via load lock reduced batch processing times and higher throughput
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Source chamber remains under vacuum for most repeatable process conditions
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Upgradable later to full "Multi BAK” configuration as production volumes grow
FEM Multi BAK
Front End Module (FEM)
Atmospheric Front End Module for the full Multi BAK offers fully automated front end handling:
- Cassette of SMIF port configuration
- Atmospheric robot for automated wafer load to segments prior to load lock transfer
- Integration of Wafer aligner and buffer modules
- Wafer ID reader integration options
Loadlock Transfer
Common Module
Evatec load lock transfer module (LTM) technology for both BAK911 and Multi BAK delivers efficient segment exchange between load lock and process chamber for:
- Reduced process times and
- Reduced energy consumption in production
Process Chambers
Common for BAK 911 or Multi BAK
Process chambers remain under vacuum between batches for:
- Reduced base pressures
- Most repeatable process conditions
Sources
Sources and process
control for BAK 911 and Multi BAK
Proven Evatec electron beam gun know-how offers:
- Multi pocket gun technology
- Wire feeder technology for extended numbers of process funds between chamber maintenance
- Quartz crystal control technology for extended life between crystal exchange
The Multi BAK - A leap forward
1. Take a leap forward in throughput for processing on 6 and 8 inch using the tabekl below
Compare throughputs ( batches per hour) between classical and either the BAK911 or Multi BAK platform based on different standard process times in a classical BAK.
2. Take a leap forward in sustainability too
Through its concept, hardware and pumping design the Multi BAK is also leading the way in driving down energy consumption in its use. Talk to our specialists to learn how the MULTI BAK can reduce your energy consumption by top to 60% compared with conventional stand alone platforms.
Watch the BAK 911 video
Watch the Multi-BAK video
