CLUSTERLINE® Family

Benefit from the CLUSTERLINE® reputation of secure handling and precision processing on a range of platform sizes up to 650mm in applications across all Evatec core markets. 

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MEMS

Evatec supports production solutions for the metals, dielectrics and Advanced Functional Materials (Magnetics and Piezoelectrics) used in Sensors, Actuators, TFH and Quantum Computing. 

Power Devices

Benefit from Evatec's long experience in Power Device applications to increase your productivity, process stability and yield in volume production of MOSFETs, IGBTs, IGCTs, LDMOS, SiC and GaN Power Devices.

CLUSTERLINE 200 BPM

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Company Overview

Our technology has been shaping the world for over 70 years. Find out more about our company, our products and how Evatec thin films are everywhere in our daily lives. 

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Wireless

Evatec leads in PVD production, enabling RF filters, power amplifiers, HEMT on GaN, and IR devices with advanced deposition processes.

Precision Optics

Evatec thin film technology supports the economical manufacture of highly accurate optical components ensuring optimal performance in systems that rely on precise light manipulation.

CLUSTERLINE® 300

From thin wafer handling and backside metallization processes to WLCSP and FOWLP packaging applications, or the deposition of soft magnetics for integrated voltage regulators on 300mm, contact us to find out more about CLUSTERLINE® 300 configuration options and corresponding process capabilities.

CLUSTERLINE® 200

From thin wafer handling and backside metallization processes, to deposition of new piezoelectric materials like AlScN or production of precise NIR bandpass filters for consumer device applications, find out more about CLUSTERLINE® 200 configuration options and corresponding process capabilities.

PEALD Technology

With innovative features like a microwave plasma source and in-situ post-treatment capabilities, enjoy precise deposition of thin dielectric films at low temperatures.

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CLUSTERLINE® 600

Large area cluster tool dedicated to Advanced Packaging applications at panel level integrating Evatec know-how in degas, etch and deposition.

PVD Technologies

Find out how Evatec's evaporation and sputter technology know-how can help you increase your yields and drive down your costs.

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